Harvard Electronics & IC Research Laboratory -- FACILITIES

Harvard Electronics & IC Research Laboratory (Donhee Ham Laboratory)
FACILITIES

Our laboratory is equipped with state-of-the-art RF and microwave electronics & IC
testing facilities. We have a Cascade Microtech prober with an Nd/Yag laser for
metal trimming and a microchamber for EMI shielding. The laboratory equipment also
includes, or will soon include, various spectrum analyzers, network analyzers,
signal generators, high-speed real-time and digitazing oscilloscopes, noise figure meter,
function generators, phase noise analyzers, which are capable of testing up to 50 GHz.
The laboratory contains a chip assembly facility as well equipped with a Westbond
wirebonder and an LPKF rapid milling machine (will soon arrive) to fabricate prototype
printed circuit boards using various materials. The lab is currently expanding to soon
include cryostats and THz characterization systems. We are grateful to Harvard
Division of Engineering and Applied Sciences (DEAS) for their generous equipment
funding.

Harvard Center for Nanoscale Systems (CNS)
FACILITIES

Harvard's CNS (Center for Nanoscale Systems) houses shared nanofabrication and
characterization facilities, maintained by technical staff supported by Harvard. This
is a major investment by Harvard to promote interdisciplinary research on small
structures in areas including Electrical Engineering, Applied Physics, Biology, and
Chemistry. CNS facilities include: 1) two clean rooms, one for soft lithograph and the
other for optical and e-beam lithography equipped with two e-beam lithography systems
(including a Raith e-beam writer) - clean room facilities also include etching, deposition,
and other aspects of nanofabrication, 2) an imaging laboratory that includes three SEMs,
a Philips STEM, and a new JEOL TEM, and 3) advanced materials synthesis and processing
equipment. A new building, the Laboratory for Integrated Science and Engineering (LISE),
is currently under construction, paid for by Harvard. This new 85,000sq. ft. building will
house expanded facilities for CNS, as well as interdisciplinary research space. We are the
members of Harvard CNS.