University at
Albany:
SUNY -- Albany Nanotech
Click on image
to
enlarge (source) |
Albany Nanotech
-- Home page
Albany
Nanotech -- Overview of infrastructure and facilities
University of
Alberta
-- NanoFab
Click
on image to enlarge
|
NanoFab: University of Alberta
Micromachining and
Nanofabrication Facility -- Home page
The new cleanroom
size:
3,500 nsf class 100 space. (source)
Arizona State
University
-- Center for Solid State
Electronics
Research (CSSER)
Click on image to
enlarge (source) |
Center for Solid State
Electronics
Research (CSSER) -- Home page
Center for
Solid State Electronics Research (CSSER)
-- Facilities
Auburn University
-- Alabama Microelectronics Science and
Technology Center (AMSTC)
Click on image
to
enlarge (source) |
Alabama
Microelectronics
Science and Technology Center (AMSTC) -- Home page
The new cleanroom
size:
4,000 nsf of class 100 space. (source)
Boston University
-- The Photonics Center
Click on image to enlarge
The Photonics
Center at Boston University -- Home page
From TradelineInc: Profile:
Photonic Center, Boston University
A full elevation of the building
Cleanroom size:
800 nsf of class 100 space; 1,600 nsf of class
1,000;
1,500 nsf 10,000 space.
Brigham Young
University
-- Integrated Microelectronics Laboratory
(IML)
Click on image to
enlarge (source) |
IML -- Home page
Cleanroom size:
1,650 nsf of class 10 space. (source)
University of
California,
Berkeley -- Microfabrication Laboratory
(Microlab)
Click on image to
enlarge Cory Hall |
Microfabrication Laboratory
(Microlab) -- Home page
Microfabrication
Laboratory (Microlab) -- Layout on 4th floor of Cory Hall
Microlab Web Camera
- LIVE! -- An example of lab view
Integrated
Materials Laboratory -- Home page
University of
California
at Davis -- Microfabrication Facility
UC Davis Microfabrication
Facility
-- Home page
Cleanroom
layout
Cleanroom size:
13,400 nsf of class 100 space. (source)
Research in
Solid-State
Electronic Devices and Sensors -- Home page
University of
California
at Los Angeles -- Nanoelectronics
Research Facility
(NRF)
Click on image to enlarge
NRL -- Home page
Interactive
Nanolab
layout
Cleanroom size:
500 nsf of class 100 space; 8,000 nsf of class 1000
space.
(source)
ICSL(net)
-- Integrated Circuits and Systems home page
University of
California
at Santa Barbara -- Nanotech,
Nanofabrication
Facility
Click on image to
enlarge (source) |
Nanotech-- Home page
Nanotech
--
Cleanrooms
Nanotech --
Cleanroom
layouts
Description of an expanded
facility
now under construction :
"State funds are
requested
for preparation of working drawings and construction of the
Engineering-Science
Building. This project will construct a 52,000 asf building to meet the
instruction and research needs and projected enrollment increases in
the College of Engineering.
The project will include a 10,000 asf nanofabrication facility to
address
the instruction and research needs of engineering and science
departments
in the expanding field of semi-conductors. The Engineering-Science
Building
includes two classrooms and specialized teaching laboratories to
support
the departments of Electrical and Computer Engineering and Mechanical
and
Environmental Engineering." (source)
California
Institute of
Technology/Jet Propulsion Laboratory -- Center
for Space Microelectronics Technology (CSMT)
Click on image to enlarge (source)
|
CSMT -- Home
page
CSMT
-- Laboratory facilities
Carleton University
-- Microelectronics Fabrication
Laboratory
(MFL)
Click image to
enlarge (source) |
MFL -- Home
page
Cleanroom size:
Approximately 2,700 nsf of class 100/10,000
space.
(source)
Carnegie Mellon
University
-- Center for Highly Integrated
Information
Processing and Storage Systems (CHI2PS2)
Click image to enlarge
CHI2PS2
-- Home page
Nanofabrication
Facilities
Interactive
cleanroom layout tour
Cleanroom size:
1,500 nsf of class 10 space; 2,500 nsf of class 100
space;
thin-film lab space. (source)
University of
Cincinnati
-- Nanoelectronics Laboratory
Click image to enlarge
Nanoelectronics Laboratory --
Home
page
Nanoelectronics
Laboratory -- Movie of cleanroom
Cornell University
-- Cornell Nanofabrication Facility (CNF)
Planned Duffield
Hall
- Click image to enlarge
|
Cornell Nanofabrication Facility
(CNF)
-- Home page
CNF --
Lab
and Equipment Information
"The Cornell
Nanofabrication
Facility is located in the Knight Laboratory on the Cornell University
campus.
The Knight Laboratory is a 20,000 square-foot building which was
specifically designed and constructed by Cornell for the facility in
late 1981. All of
the instruments in the facility, with the exception of the computing
equipment,
are in the cleanroom. The cleanroom occupies 7,500 square-feet and is
approximately
Class 1000. Local processing benches within that cleanroom are Class
10.
Careful consideration was given to the facilities for advanced
lithography.
Each of the rooms housing the electron-beam lithography systems are on
concrete
slabs isolated from the rest of the building foundation. Furthermore,
the
walls of these rooms are constructed with no embedded metal. The
resulting
environment has very low vibration (<50 nm at 3 Hz) and
electromagnetic
interference (<2 mG at 60 Hz). Extensive automatic safety systems
are
employed in the areas of the facility where hazardous gases are
used.
"Cornell University is presently
designing
a new building to house the CNF and several other laboratories in the
College of Engineering. Duffield Hall will be a state-of-the-art
facility for the advancement of nanotechnology. Construction is
expected to begin in 2000 and
the building is slated for occupancy by 2002. The CNF will continue to
operate
in Knight Laboratory during the construction and will gradually migrate
into
Duffield Hall with little or no disruption it its activities. Duffield
Hall
will be a unique home for research in nanotechnology for decades to
come."
(source)
Duffield
Hall -
Introduction
Duffield
Hall - Project
Duffield
Hall
- Financial Considerations
Duffield
Hall
- Previews
Online Draft
Environmental Impact Statement (pdf)
Architect: Zimmer Gunsul Frasca
Zimmer
Gunsul Frasca Partnership
Architect's
description of Duffield Hall project
Compound
Semiconductor Research at Cornell University
Nanobiotechnology
Center (NBTC) -- Home page
Dartmouth
University -- Microengineering Cleanroom
Laboratory
Click image to enlarge
Microengineering
Cleanroom Laboratory -- Home page
Cleanroom size:
250 sf of class 100 space; 600 sf of class 1,000 space.
(source)
ETH: Paul Scherrer
Institut
-- Laboratory for Micro- and
Nanotechnology
Laboratory for Micro- and
Nanotechnology, PSI -- Home page
Cleanroom tour
University of
Florida
-- Microfabritech
Microfabitech -- Home page
Georgia Institute
of Technology
-- Microelectronics Research Center (MiRC)
Click image to
enlarge Petitt MiRC |
Microelectronics Research Center
(MiRC)
-- Home page
MiRC Cleanroom Resources
Cleanroom size:
7,000 sf. (source)
The Vitual Cleanroom
Article: Semiconductor
industry establishes chip research center at MiRC
Interconnection Focus
Center
-- Home page
Howard University
-- Materials Science Research Center of
Excellence (MSRCE)
Material
Science
Research Center of Excellence (MSRCE) -- Home page
MSRCE
--
Facilities
University of
Illinois
(Chicago) -- Microfabrication
Applications Laboratory
(MAL)
Microfabrication Applications
Laboratory
(MAL) -- Home page
MAL --
Facilities
University of
Illinois
(Urbana-Champaign) -- Micro and
Nanotechnology Laboratory
Click image to
enlarge (source) |
Micro and
Nanotechnology Laboratory -- Home
page
Micro and
Nanotechnology Laboratory -- Cleanrooms
Cleanroom
size: Total 8,000 nsf
8-500 nsf class 100 laboratories
8-500 nsf class 1000 laboratories
University of
Louisville
-- MicroTechnology
Click image to
enlarge (source) |
University of Louisville
MicroTechnology
Home Page
Cleanroom
Virtual Tour
Massachusetts
Institute
of Technology -- Microsystems Technology
Laboratories
Click image to
enlarge Building 39 (source) |
"The Microsystems
Technology
Laboratories is an Interdepartmental Laboratory of the Institute
reporting
to the Dean of the School of Engineering. Founded during the early
1980's,
the MTL maintains the primary campus facilities to support research
activities in the fabrication and study of small (i.e., micron,
submicron, and nanometer) structures and their use for the
implementation of integrated systems ranging from X-ray lenses to VLSI
circuits to micro-gas turbine engines. The MTL is
located in the Gordon Stanley Brown Building (Building 39) and in
Building 38." (source)
Microsystems
Technology
Laboratories (MTL) -- Home page
MTL: Microfab
-- Home page
Cleanroom size:
Integrated
Circuits Laboratory (ICL): 2,800 nsf of class 10 space
Technology
Research Laboratory (TRL): 2,200 nsf of class 100 space
Exploratory
Materials Laboratory (EML): 1,500 nsf class 1000 space (source)
Architect: Skidmore Owings &
Merrill
University of
Michigan
-- Solid State Electronics Laboratory
(SSEL)
Click image to
enlarge (source) |
SSEL
-- Home page
SSEL
Clean
Room Facilities
Cleanroom size:
1,000 nsf of class 10 space; 4,000 nsf of class 100
space;
3,000 nsf of class 1,000 space, separate instructional space. (source)
University of
Minnesota
-- Nanofabrication Center (NFC)
Click image to
enlarge (source |
Nanofabrication Center (NFC) --
Home page
University of Minnesota: Institute
of
Technology -- Home page
Cleanroom size:
3,000 sf of class 10 space; 2,700 sf of
class
100 space; 3,000 sf of gray space. (source)
Université
de Montréal/École Polytechnique -- Groupe des Couches Minces (GCM)
GCM (Research Group
on
the Physics and Technology of Thin Films) -- Home page (English
version)
Laboratory for the Integration of
Sensors
and Actuators (LISA)
LISA --
English
home page
LISA
-- Facilities
Compound
Semiconductors
Epitaxy and Characterization Laboratory -- Home page
New Jersey
Institute of
Technology -- Microelectronics Research
Center
(MRC)
Click image to
enlarge (source) |
MRC -- Home page
Cleanroom size:
specially noted: 1,200 nsf of class 10 space. (source)
North Carolina
State University
-- Center for Advanced Electronic
Materials
Processing (AEMP)
Click image to
enlarge (source) |
AEMP -- Home
page
University of North
Texas
- Nanostructural Materials Research (NMR)
Click image to
enlarge (source) |
Industry Cooperative Research Center
for
Nanostructural Materials Research (I/UCRC for NMR) -- Home
page
Northwestern
University
-- Center for Nanofabrication and
Molecular
Self-Assembly
Click image to
enlarge (source) |
Center for
Nanofabrication
and Molecular Self-Assembly -- Home page
New Center for
Nanofabrication
and Molecular Self-Assembly -- Detailed floor plans and pictures of
building
model
Architect: Zimmer
Gunsul Frasca
Zimmer
Gunsul Frasca Partnership
Architect's
description of project
Notre Dame
University
-- Microelectronics Laboratory
Click image to enlarge
Notre Dame Microelectronics
Laboratory
-- Home page
University of
Pennsylvania
-- Microfabrication Facility
Microfabrication
Facility
-- Overview
Pennsylvania State
University
-- Electronic Materials and Processing
Research
Laboratory (EMPRL)
Click image to
enlarge Material Research Institute |
Materials Research Institute
Building
-- Home page
Electronic Materials and Processing
Research Laboratory (EMPRL)
MicroFab
Facility
-- Home page
MicroFab
Lab Layout and Equipment Photos
NanooFab
Facility -- Home page
NanoFab
--
Equipment & Facilities
NanoFab
-- Virtual Tour
Electronic
and Opto-Electronic Materials and Processing
Princeton
University -- Nanostructure Laboratory
(NSL)
Click image to enlarge
Nanostructure
Laboratory
-- Home page
NSL -- Lab
Facilities
Purdue University
-- Wide Band Gap Research (WBG)
Click image to enlarge
Solid
State
Devices and Materials -- Overview
Wide Band Gap Research --
Home
page
Wide Band Gap Research
-- Facilities
Purdue's NanoTechnology Initiative
(NTI)
Rensselaer
Polytechnic
Institute -- Center for Integrated
Electronics,
Electronics Manufacturing, and Electronic Media (CIEEM)
Click image to
enlarge (source) |
Home page of Center for Integrated
Electronics,
Electronics Manufacturing and Electronic Media (CIEEM)
CIEEM --
Overview
CIEEM
-- Facilities
Cleanroom size:
9,500 nsf total with 5,700 nsf of class 100 space. (source)
Focus
Center
- New York (fc-ny): Rensselaer -- Detailed overview
Rice University -- Center for Nanoscale Science and Technology
(CNST)
Click image to
enlarge (source) |
Center for Nanoscale Science and
Technology
(CNST) -- Home page
Dell Butcher Hall: Home of
CNST
-- Building information
Building
Floor Plans and Specifications -- Available
only by password
Architect: Antoine Predock
Antoine Predock Architect
-- Home page
Architect's
description
of project
The
Contemporary
Arts Center page
Projects
San Jose State
University
-- Center for Electron Materials and
Devices
(CEMD)
Click image to
enlarge (source) |
CEMD -- Home page
Simon Fraser
University
-- Compound Semiconductor Laboratory
Compound
Semiconductor
Laboratory -- Home page
Stanford University
-- Stanford Nanofabrication Facility (SNF)
Click image to
enlarge CIS Building |
SNF -- Home page
Integrated
Circuits Laboratory -- Home page
Cleanroom size:
10,500
nsf class 100 space (source)
Integrated
Circuits Laboratory -- Pictures of building
Dedication
of
Paul G. Allen Center for Integrated Systems - June 11, 1996
Equipment
in the SNF Laboratory
Architect: Antoine Predock
Antoine Predock Architect
-- Home page
Architect's
description
of project
The
Contemporary
Arts Center page
Projects
University of Texas
in
Arlington -- NanoFab Center
Click image to
enlarge (source)
|
NanoFab Center -- Home
page
Cleanroom size:
8,500 nsf of space. (source)
University of Texas
at
Auston --
Click image to enlarge
Microelectronics
Research Center -- Home page
Cleanroom size:
12,000 nsf of class 100/1000 space. (source)
Texas A&M
University
-- Center for Electronic Materials,
Devices
and Systems (CEMDAS)
Click image to
enlarge (source) |
Center for
Electronic
Materials, Devices and Systems (CEMDAS) -- Home page
CEMDAS
Facilities
Texas Tech
University
-- Jack Maddox Research Laboratory
Click image to
enlarge (source) |
Program for Semiconductor Product
Engineering
(PSPE) -- Home page
Jack Maddox Research Laboratory
--
Home page
Jack Maddox
Research
Laboratory Facilities
University of
Toronto
-- Electronic Materials Group (EMG)
Click image to enlarge
Electronic Materials Group (EMG)
-- Home page
University of
Washington
-- Washington Technology Center (WTC)
Click image to
enlarge (source) |
Washington Technology Center (WTC)
-- Home page
WTC:
Microfabrication
Facility -- Home page
WTC:
Microfabrication Laboratory -- Layout
Pictures of Fluke Hall, the location
of
WTC:
Picture 1 (source)
Picture 2 (source)
Picture 3 (source)
Architect: NBBJ
NBBJ
(Naramore,
Bain, Brady and Johanson) -- Home page
Architect's
description of project
University of
Wisconsin
at Madison -- Wisconsin Center for
Applied Microelectronics (WCAM)
Click image to enlarge
WCAM -- Home page
WCAM -- Cleanroom
layout
Cleanroom size:
900 sf
of
class 100 space; 3,000 sf class 10,000 (source)
Center for
Nanotechnology
(CNTech) -- Home page
Center
for
Nanotechnology (CNTech) -- Facilities
Yale University -- Center for
Microelectronic
Materials and Structures
Click image to
enlarge (source) |
Center for Microelectron
Materials
and Structures (mELM) -- Home page
Center for
Microelectronic
Materials and Structures -- Cleanroom
Cleanroom size:
2,00 nsf of class 100 space.
|
