A Compendium of Nano-/Microfabrication Facilities

Introduction

As part of the planning process for Harvard's new physical sciences building (NPSB), I thought I should familiarize myself with nano-/microfacilities that have been designed and built recently at other academic institutions.   I have found that it has been most useful for me to record my browsings in html format and, for what it's worth, I herein share my findings with you.

As a metric, I have included, where possible, an estimate of the cleanroom size of each facility (see table of comparisons).  Unfortunately, comparisons are somewhat unreliable since it is not always clear whether gross or net square footages are being quoted and whether "gray" space is included in some tallies. (Definition of cleanroom class)

Academic Nano and Micro Fabrication Facilities

University at Albany: SUNY -- Albany Nanotech


     Click on image to enlarge       (source)
Albany Nanotech -- Home page
Albany Nanotech -- Overview of infrastructure and facilities

University of Alberta -- NanoFab

    Click on image to enlarge
NanoFab: University of Alberta Micromachining and Nanofabrication Facility -- Home page
The new cleanroom size:
        3,500 nsf class 100 space. (source)

Arizona State University -- Center  for Solid State Electronics Research (CSSER)


    Click on image to enlarge   (source)
Center for Solid State Electronics Research (CSSER) -- Home page
Center for Solid State Electronics Research (CSSER) -- Facilities

Auburn University -- Alabama Microelectronics Science and Technology Center (AMSTC)


     Click on image to enlarge   (source)
Alabama Microelectronics Science and Technology Center (AMSTC) -- Home page
The new cleanroom size:
        4,000 nsf of class 100 space. (source)

Boston University -- The Photonics Center


     Click on image to enlarge
The Photonics Center at Boston University -- Home page
From TradelineInc: Profile: Photonic Center, Boston  University
        A full elevation of the building
Cleanroom size:
        800 nsf of class 100 space; 1,600 nsf of class 1,000;  1,500 nsf 10,000 space.

Brigham Young University -- Integrated Microelectronics Laboratory (IML)


     Click on image to enlarge   (source)
IML -- Home page
Cleanroom size:
        1,650 nsf of class 10 space. (source)

University of California, Berkeley -- Microfabrication Laboratory (Microlab)


     Click on image to enlarge   Cory Hall
Microfabrication Laboratory (Microlab) -- Home page
Microfabrication Laboratory (Microlab) -- Layout on 4th floor of Cory Hall
Microlab Web Camera - LIVE! -- An example of lab view
Integrated Materials Laboratory -- Home page

University of California at Davis -- Microfabrication Facility

UC Davis Microfabrication Facility -- Home page
Cleanroom layout
Cleanroom size:
        13,400 nsf of class 100 space. (source)
Research in Solid-State Electronic Devices and Sensors -- Home page

University of California at Los Angeles -- Nanoelectronics Research Facility (NRF)


     Click on image to enlarge
NRL -- Home page
Interactive Nanolab layout
Cleanroom size:
        500 nsf of class 100 space; 8,000 nsf of class 1000 space. (source)
ICSL(net) -- Integrated Circuits and Systems home page

University of California at Santa Barbara -- Nanotech, Nanofabrication Facility


     Click on image to enlarge   (source)
Nanotech-- Home page
Nanotech -- Cleanrooms
Nanotech -- Cleanroom layouts

Description of an expanded facility now under construction :

"State funds are requested for preparation of working drawings and construction of the Engineering-Science Building. This project will construct a 52,000 asf building to meet the instruction and research needs and projected enrollment increases in the College of Engineering. The project will include a 10,000 asf nanofabrication facility to address the instruction and research needs of engineering and science departments in the expanding field of semi-conductors. The Engineering-Science Building includes two classrooms and specialized teaching laboratories to support the departments of Electrical and Computer Engineering and Mechanical and Environmental Engineering." (source)

California Institute of Technology/Jet Propulsion Laboratory -- Center for Space Microelectronics Technology (CSMT)

     Click on image to enlarge   (source)
CSMT -- Home page
CSMT -- Laboratory facilities

Carleton University -- Microelectronics Fabrication Laboratory (MFL)


     Click image to enlarge   (source)
MFL -- Home page
Cleanroom size:
        Approximately 2,700 nsf of class 100/10,000  space. (source)

Carnegie Mellon University -- Center for Highly Integrated Information Processing and Storage Systems (CHI2PS2)


     Click image to enlarge
CHI2PS2 -- Home page
Nanofabrication Facilities
Interactive cleanroom layout tour
Cleanroom size:
        1,500 nsf of class 10 space; 2,500 nsf of class 100 space; thin-film lab space. (source)

University of Cincinnati -- Nanoelectronics Laboratory


     Click image to enlarge
Nanoelectronics Laboratory -- Home page
Nanoelectronics Laboratory -- Movie of cleanroom

Cornell University -- Cornell Nanofabrication Facility (CNF)

Planned Duffield Hall - Click image to enlarge
Cornell Nanofabrication Facility (CNF) -- Home page
        CNF -- Lab and Equipment Information
"The Cornell Nanofabrication Facility is located in the Knight Laboratory on the Cornell University campus. The Knight Laboratory is a 20,000 square-foot building which was specifically designed and constructed by Cornell for the facility in late 1981. All of the instruments in the facility, with the exception of the computing equipment, are in the cleanroom. The cleanroom occupies 7,500 square-feet and is approximately Class 1000. Local processing benches within that cleanroom are Class 10. Careful consideration was given to the facilities for advanced lithography. Each of the rooms housing the electron-beam lithography systems are on concrete slabs isolated from the rest of the building foundation. Furthermore, the walls of these rooms are constructed with no embedded metal. The resulting environment has very low vibration (<50 nm at 3 Hz) and electromagnetic interference (<2 mG at 60 Hz). Extensive automatic safety systems are employed in the areas of the facility where hazardous gases are used. 

"Cornell University is presently designing a new building to house the CNF and several other laboratories in the College of Engineering. Duffield Hall will be a state-of-the-art facility for the advancement of nanotechnology. Construction is expected to begin in 2000 and the building is slated for occupancy by 2002. The CNF will continue to operate in Knight Laboratory during the construction and will gradually migrate into Duffield Hall with little or no disruption it its activities. Duffield Hall will be a unique home for research in nanotechnology for decades to come." (source

Duffield Hall - Introduction
        Duffield Hall - Project
        Duffield Hall - Financial Considerations
        Duffield Hall - Previews
        Online Draft Environmental Impact Statement (pdf)
Architect: Zimmer Gunsul Frasca
        Zimmer Gunsul Frasca Partnership
        Architect's description of Duffield Hall project
Compound Semiconductor Research at Cornell University
Nanobiotechnology Center (NBTC) -- Home page

Dartmouth University -- Microengineering Cleanroom Laboratory


     Click image to enlarge
Microengineering Cleanroom Laboratory -- Home page
Cleanroom size:
        250 sf of class 100 space; 600 sf of class 1,000 space. (source)

ETH: Paul Scherrer Institut -- Laboratory for Micro- and Nanotechnology

Laboratory for Micro- and Nanotechnology, PSI -- Home page
Cleanroom tour

University of Florida -- Microfabritech


     Click image to enlarge   Rhines Hall
Microfabitech -- Home page

Georgia Institute of Technology -- Microelectronics Research Center (MiRC)


     Click image to enlarge   Petitt MiRC
Microelectronics Research Center (MiRC) -- Home page
MiRC Cleanroom Resources
Cleanroom size:
        7,000 sf. (source)
The Vitual Cleanroom
Article: Semiconductor industry establishes chip research center at MiRC
Interconnection Focus Center -- Home page

Howard University -- Materials Science Research Center of Excellence (MSRCE)

Material Science Research Center of Excellence (MSRCE) -- Home page
MSRCE -- Facilities

University of Illinois (Chicago) -- Microfabrication Applications Laboratory (MAL)

Microfabrication Applications Laboratory (MAL) -- Home page
MAL -- Facilities

University of Illinois (Urbana-Champaign) -- Micro and Nanotechnology Laboratory


     Click image to enlarge   (source)
Micro and Nanotechnology Laboratory -- Home page
Micro and Nanotechnology Laboratory -- Cleanrooms
Cleanroom size: Total 8,000 nsf
        8-500 nsf class 100 laboratories
        8-500 nsf class 1000 laboratories

University of Louisville -- MicroTechnology


     Click image to enlarge   (source)
University of Louisville MicroTechnology Home Page
Cleanroom Virtual Tour

Massachusetts Institute of Technology -- Microsystems Technology Laboratories


     Click image to enlarge   Building 39 (source)
"The Microsystems Technology Laboratories is an Interdepartmental Laboratory of the Institute reporting to the Dean of the School of Engineering. Founded during the early 1980's, the MTL maintains the primary campus facilities to support research activities in the fabrication and study of small (i.e., micron, submicron, and nanometer) structures and their use for the implementation of integrated systems ranging from X-ray lenses to VLSI circuits to micro-gas turbine engines. The MTL is located in the Gordon Stanley Brown Building (Building 39) and in Building 38." (source)
Microsystems Technology Laboratories (MTL) -- Home page
MTL: Microfab -- Home page
Cleanroom size:
      Integrated Circuits Laboratory (ICL):  2,800 nsf of class 10 space
      Technology Research Laboratory (TRL): 2,200 nsf of class 100 space
      Exploratory Materials Laboratory (EML): 1,500 nsf class 1000 space (source)


Architect: Skidmore Owings & Merrill

University of Michigan -- Solid State Electronics Laboratory (SSEL)


     Click image to enlarge   (source)
SSEL -- Home page
SSEL Clean Room Facilities
Cleanroom size:
        1,000 nsf of class 10 space; 4,000 nsf of class 100 space; 3,000 nsf of class 1,000 space, separate instructional space. (source)

University of Minnesota -- Nanofabrication Center (NFC)


     Click image to enlarge   (source
Nanofabrication Center (NFC) -- Home page
University of Minnesota: Institute of Technology -- Home page
Cleanroom size:
        3,000 sf of class 10 space; 2,700 sf of class 100 space; 3,000 sf of gray space. (source)

Université de Montréal/École Polytechnique -- Groupe des Couches Minces (GCM) 

GCM (Research Group on the Physics and Technology of Thin Films) -- Home page (English version)
Laboratory for the Integration of Sensors and Actuators (LISA)
        LISA -- English home page
        LISA -- Facilities
Compound Semiconductors Epitaxy and Characterization Laboratory -- Home page

New Jersey Institute of Technology -- Microelectronics Research Center (MRC)


     Click image to enlarge   (source)
MRC -- Home page
Cleanroom size:
        specially noted: 1,200 nsf of class 10 space. (source)

North Carolina State University -- Center for Advanced Electronic Materials Processing (AEMP)


     Click image to enlarge   (source)
AEMP -- Home page

University of North Texas - Nanostructural Materials Research (NMR)


     Click image to enlarge   (source)
Industry Cooperative Research Center for Nanostructural Materials Research (I/UCRC for NMR) -- Home page 

Northwestern University -- Center for Nanofabrication and Molecular Self-Assembly 


     Click image to enlarge   (source)
Center for Nanofabrication and Molecular Self-Assembly -- Home page
New Center for Nanofabrication and Molecular Self-Assembly -- Detailed floor plans and pictures of building model 


Architect: Zimmer Gunsul Frasca
        Zimmer Gunsul Frasca Partnership
        Architect's description of project

Notre Dame University -- Microelectronics Laboratory


     Click image to enlarge
Notre Dame Microelectronics Laboratory -- Home page

University of Pennsylvania -- Microfabrication Facility

Microfabrication Facility -- Overview

Pennsylvania State University -- Electronic Materials and Processing Research Laboratory (EMPRL)


     Click image to enlarge   Material Research Institute
Materials Research Institute Building -- Home page
Electronic Materials and Processing Research Laboratory (EMPRL)
        MicroFab Facility -- Home page
        MicroFab Lab Layout and Equipment Photos
        NanooFab Facility -- Home page
        NanoFab -- Equipment & Facilities
        NanoFab -- Virtual Tour
        Electronic and Opto-Electronic Materials and Processing

Princeton University -- Nanostructure Laboratory (NSL)


     Click image to enlarge
Nanostructure Laboratory -- Home page
NSL -- Lab Facilities

Purdue University -- Wide Band Gap Research (WBG)


     Click image to enlarge
Solid State Devices and Materials -- Overview
Wide Band Gap Research -- Home page
Wide Band Gap Research -- Facilities
Purdue's NanoTechnology Initiative (NTI)

Rensselaer Polytechnic Institute -- Center for Integrated Electronics, Electronics Manufacturing, and Electronic Media (CIEEM)


     Click image to enlarge   (source)
Home page of  Center for Integrated Electronics, Electronics Manufacturing and Electronic Media (CIEEM)
CIEEM -- Overview
CIEEM -- Facilities
Cleanroom size:
        9,500 nsf total with 5,700 nsf of class 100 space. (source)
Focus Center - New York (fc-ny): Rensselaer -- Detailed overview

Rice University -- Center for Nanoscale Science and  Technology (CNST)


     Click image to enlarge    (source)
Center for Nanoscale Science and Technology (CNST) -- Home page
Dell Butcher Hall: Home of CNST -- Building information
Building Floor Plans and Specifications -- Available only by password


Architect: Antoine Predock
        Antoine Predock Architect -- Home page
        Architect's description of project
        The Contemporary Arts Center page
        Projects

San Jose State University -- Center for Electron Materials and Devices (CEMD)


     Click image to enlarge   (source)
CEMD -- Home page

Simon Fraser University -- Compound Semiconductor Laboratory

Compound Semiconductor Laboratory -- Home page

Stanford University -- Stanford Nanofabrication Facility (SNF)


     Click image to enlarge   CIS Building
SNF -- Home page
Integrated Circuits Laboratory -- Home page
Cleanroom size:
       10,500 nsf class 100 space (source)
Integrated Circuits Laboratory -- Pictures of building
Dedication of Paul G. Allen Center for Integrated Systems - June 11, 1996
Equipment in the SNF Laboratory


Architect: Antoine Predock
        Antoine Predock Architect -- Home page
        Architect's description of project
        The Contemporary Arts Center page
        Projects

University of Texas in Arlington -- NanoFab Center


     Click image to enlarge   (source)
NanoFab Center -- Home page
Cleanroom size:
        8,500 nsf of space. (source)

University of Texas at Auston -- 


     Click image to enlarge
Microelectronics Research Center -- Home page
Cleanroom size:
        12,000 nsf of class 100/1000 space. (source)

Texas A&M University -- Center for Electronic Materials, Devices and Systems (CEMDAS)


     Click image to enlarge   (source)
Center for Electronic Materials, Devices and Systems (CEMDAS) -- Home page
CEMDAS Facilities

Texas Tech University -- Jack Maddox Research Laboratory


     Click image to enlarge   (source)
Program for Semiconductor Product Engineering (PSPE) -- Home page
Jack Maddox Research Laboratory -- Home page
Jack Maddox Research Laboratory Facilities

University of Toronto -- Electronic Materials Group (EMG)


     Click image to enlarge
Electronic Materials Group (EMG) -- Home page

University of Washington -- Washington Technology Center (WTC)


     Click image to enlarge   (source)
Washington Technology Center (WTC) -- Home page
WTC: Microfabrication Facility -- Home page
WTC: Microfabrication Laboratory -- Layout
Pictures of Fluke Hall, the location of WTC:
        Picture 1 (source)
        Picture 2 (source)
        Picture 3 (source)


Architect: NBBJ
        NBBJ (Naramore, Bain, Brady and Johanson) -- Home page
        Architect's description of project

University of Wisconsin at Madison -- Wisconsin Center for Applied Microelectronics (WCAM)


     Click image to enlarge
WCAM -- Home page
WCAM -- Cleanroom layout
Cleanroom size:
      900 sf of class 100 space; 3,000 sf class 10,000 (source)
Center for Nanotechnology (CNTech) -- Home page
Center for Nanotechnology (CNTech) -- Facilities

Yale University -- Center for Microelectronic Materials and Structures


     Click image to enlarge   (source)
Center for Microelectron Materials and Structures (mELM) -- Home page
Center for Microelectronic Materials and Structures -- Cleanroom
Cleanroom size:
        2,00 nsf of class 100 space.

Other Useful Nano-/Microfabrication Links

  • Cleanroom Tips from Optimum Koncepts:

  •        Tip #1, What HEPA Filters Can and Can Not Do! (local copy)
           Tip #2 ,The Process Equipment is Part of the Cleanroom Too! (local copy)
     
  • Microfabrication Facilities At Other Universities from the University of Louisville
  • A definition of Cleanroom Class  from the University of Louisville (local copy)

  •  
  • The Laboratories Subway -- Clickable map
  • National Nanofabrication Users Network (NNUN) -- Home page
  • Home page and academic list of Gina Miller's Nanotechnologies Industries.
  • Nan Ox's list of Semiconductor Laboratories
  • Mitre's Gateway to the Nanocosm -- provides the Internet Gateway to nanoelectronics research and development information and resources from around the world.
  • National Nanofabrication Facility, Australia
  • LLNL Microtechnology Center
  • University of Idaho Links to VLSI WWW Servers
  • Semiconductor Companies list from UIUC
  • Microcalorimetry
  • Nanometer Pattern Generation System
  • The Nanotechnology Database from Loyola College in Maryland
  • WTEC Panel Report on Nanostructure Science and Technology
  • Energy Management in Semiconductor Cleanrooms
  • HEPA/ULPA Filters

  •        What are HEPA Filters?
           About HEPA Filters
           Typical HEPA filter construction (source)
     

    Other NPSB Planning Pages:

  • Laboratory Architecture -- Exemplars
  • Moneo Gallery
  • Profiles of Noted Architects and Architectural Firms
  • Miscellaneous Architectural Information

  • This page was prepared and is maintained by R. Victor Jones
    Comments to: jones@deas.harvard.edu.

    Last updated November 21, 2001